The hierarchical HDL-based design of an integrated MEMS-CMOS oscillator

Author

Gaddi, Roberto

Author_Institution

ARCES, Bologna Univ., Italy

fYear

2003

fDate

5-7 May 2003

Firstpage

176

Lastpage

180

Abstract

A hierarchical and mixed-domain design approach is implemented within the Cadence^® simulation framework and applied to an integrated MEMS-CMOS oscillator. Parameters concerning both the electronic circuit description at transistor level and the MEMS structure defined by its topology and dimensions, are available during simulation. This approach can lead to a full optimisation of the complete MEMS-CMOS sub-system, with a view to both electrical and mechanical specifications.

Keywords

CMOS integrated circuits; integrated circuit design; micromechanical devices; oscillators; Cadence^® simulation framework; HDL based design; MEMS structure; domain design approach; electrical specifications; electronic circuit description; integrated MEMS-CMOS oscillator; mechanical specifications; transistor level; CMOS technology; Circuit simulation; Design automation; Electronic circuits; Hardware design languages; Libraries; Mathematical model; Micromechanical devices; Oscillators; Packaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on

Print_ISBN

0-7803-7066-X

Type

conf

DOI

10.1109/DTIP.2003.1287031

Filename

1287031

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2822568