Design of piezoelectric cantilever microphone and its MEMS-acoustical circuit for hearing aid devices

Author

Saleh, Sherif A. ; Elsimary, Hamed ; Mohamed, Amal Z. ; Hamed, Hesham F.

Author_Institution

Electron. Res. Inst., Cairo, Egypt

Volume

2

fYear

2003

fDate

27-30 Dec. 2003

Firstpage

897

Abstract

A micromachined piezoelectric cantilever transducer, which works as a microphone has been designed. The 1800 × 1800 × 2.9μm³ cantilever has a lead zirconate titanate (PZT) piezoelectric thin film sandwiched between two aluminum electrodes on a supporting layer of silicon nitride. The static analysis of piezoelectric cantilever is typically performed, which describes the deflection of a generic m-layer piezoelectric multimorph, and acoustic modeling of the microphone has been described. The maximum deflection at the tip of the cantilever is 22μm, and the maximum difference output voltage between two electrodes is 0.1mV.

Keywords

hearing aids; lead compounds; micromechanical devices; microphones; piezoelectric thin films; piezoelectric transducers; silicon compounds; MEMS-acoustical circuit; PbZrTi; SiN; acoustic model; aluminum electrodes; generic m-layer piezoelectric multimorph; hearing aid device; lead zirconate titanate; micromachined piezoelectric cantilever transducer; piezoelectric cantilever microphone; piezoelectric thin film; silicon nitride; static analysis; Aluminum; Auditory system; Circuits; Electrodes; Microphones; Piezoelectric devices; Piezoelectric films; Piezoelectric transducers; Silicon; Titanium compounds; (PZT) and acoustic; Microphone; cantilever; model piezoelectric; multimorph;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2003 IEEE 46th Midwest Symposium on

ISSN

1548-3746

Print_ISBN

0-7803-8294-3

Type

conf

DOI

10.1109/MWSCAS.2003.1562431

Filename

1562431