Title :
Dielectric miceocavity resonators based on silicon mold
Author :
Li, Kgui ; Chen, Di ; Zhu, Jun ; Liu, Jingquan ; Zhang, Jiliang
Author_Institution :
Key Lab. for Thin Film & Microfabrication of Minist. of Educ., Shanghai Jiao Tong Univ., China
Abstract :
Microcavity resonators based on the developed a new fabrication technique to obtain silicon mold with crystalline flat planes are designed and fabricated. The principle, design, fabrication process, and performance as a resonator for application in both the dye laser and microcavity type optical filter based on two optical fibers and cavity resonator are described.
Keywords :
cavity resonators; dielectric resonators; dye lasers; elemental semiconductors; micromechanical resonators; optical filters; silicon; Si; crystalline flat planes; dielectric microcavity resonators; dye laser; microcavity type optical filter; optical fibers; silicon mold; Crystallization; Dielectrics; Fiber lasers; Laser cavity resonators; Microcavities; Optical design; Optical device fabrication; Optical resonators; Process design; Silicon;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
Print_ISBN :
0-7803-7066-X
DOI :
10.1109/DTIP.2003.1287048
