DocumentCode
2822997
Title
New aspects of simulation in hot-embossing
Author
Worgull, Matthias ; Heckele, Mathias
Author_Institution
Inst. fur Mikrostrukturtech., Forschungszentrum Karlsruhe AC, Germany
fYear
2003
fDate
5-7 May 2003
Firstpage
272
Lastpage
274
Abstract
Hot embossing is especially well suited for manufacturing small and medium volume series. However a wider diffusion of this process is currently seriously hampered by the lack of adequate simulation tools for process optimization and part design. This lack of simulation tools is becoming critical as the dimensions of the microstructures continuously shrink from micron and sub-micron towards nano-scales and as productivity requirements dictate the enlargement of formats to process larger numbers of devices in parallel. Having no macroscopic equivalent the micro hot embossing process cannot be described by simple down scaling of existing software tools like in injection molding. In this paper a first access is described how numerical simulation also can be applied to the hot embossing process.
Keywords
embossing; injection moulding; micromachining; micromechanical devices; polymer melts; hot-embossing; injection molding; micro hot embossing process; microstructure; numerical simulation; Application software; Compression molding; Computational modeling; Embossing; Filling; Injection molding; Polymers; Softening; Software tools; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
Print_ISBN
0-7803-7066-X
Type
conf
DOI
10.1109/DTIP.2003.1287051
Filename
1287051
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