• DocumentCode
    2822997
  • Title

    New aspects of simulation in hot-embossing

  • Author

    Worgull, Matthias ; Heckele, Mathias

  • Author_Institution
    Inst. fur Mikrostrukturtech., Forschungszentrum Karlsruhe AC, Germany
  • fYear
    2003
  • fDate
    5-7 May 2003
  • Firstpage
    272
  • Lastpage
    274
  • Abstract
    Hot embossing is especially well suited for manufacturing small and medium volume series. However a wider diffusion of this process is currently seriously hampered by the lack of adequate simulation tools for process optimization and part design. This lack of simulation tools is becoming critical as the dimensions of the microstructures continuously shrink from micron and sub-micron towards nano-scales and as productivity requirements dictate the enlargement of formats to process larger numbers of devices in parallel. Having no macroscopic equivalent the micro hot embossing process cannot be described by simple down scaling of existing software tools like in injection molding. In this paper a first access is described how numerical simulation also can be applied to the hot embossing process.
  • Keywords
    embossing; injection moulding; micromachining; micromechanical devices; polymer melts; hot-embossing; injection molding; micro hot embossing process; microstructure; numerical simulation; Application software; Compression molding; Computational modeling; Embossing; Filling; Injection molding; Polymers; Softening; Software tools; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
  • Print_ISBN
    0-7803-7066-X
  • Type

    conf

  • DOI
    10.1109/DTIP.2003.1287051
  • Filename
    1287051