DocumentCode
2823271
Title
Fabrication comb-drive device by MEMS and electroplating
Author
Chien, Chao-Heng ; Chen, Shi-Hao
Author_Institution
Dept. of Mech. Eng., Tatung Univ., Taipei, Taiwan
fYear
2003
fDate
5-7 May 2003
Firstpage
362
Lastpage
366
Abstract
A micro actuator as an electrostatic comb driver fabricated by MEMS surface micromachining technique and electroplating technique will be presented in this paper. The electroplating technique is applied to deposit nickel as the structure layer that is instead of the conventional polysilicon structure layer deposited by CVD technique. Using electroplated nickel instead of CVD-polysilicon, the fabrication process involves low-temperature electro-plating process; therefore, it is well suited for the post-IC process.
Keywords
electroplating; electrostatic actuators; metallic thin films; micromachining; nickel; CVD technique; MEMS surface micromachining technique; Ni; electroplating technique; electrostatic comb driver; microactuator; nickel; polysilicon structure layer; post IC process; Capacitance; Capacitors; Chemical sensors; Electromechanical sensors; Electrostatics; Fabrication; Intelligent sensors; Micromechanical devices; Nickel; Optical sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
Print_ISBN
0-7803-7066-X
Type
conf
DOI
10.1109/DTIP.2003.1287069
Filename
1287069
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