Fabrication comb-drive device by MEMS and electroplating

A micro actuator as an electrostatic comb driver fabricated by MEMS surface micromachining technique and electroplating technique will be presented in this paper. The electroplating technique is applied to deposit nickel as the structure layer that is instead of the conventional polysilicon structure layer deposited by CVD technique. Using electroplated nickel instead of CVD-polysilicon, the fabrication process involves low-temperature electro-plating process; therefore, it is well suited for the post-IC process.