Title :
A novel electrically controlled flexible liquid micro lens
Author :
Feldmann, Marco ; Bütefisch, Sebastian ; Büttgenbach, Stephanus
Author_Institution :
Inst. for Microtechnol., Technische Univ. Braunschweig, Germany
Abstract :
In this paper we present an electrically controlled flexible liquid micro lens realized by micro fabrication techniques. The base material is a silicon wafer building a sealed chamber with a compliant nitride diaphragm filled with a transparent liquid. The focus of this optical system can be controlled by varying the pressure through heating of the working fluid. With this device a laser beam has been focused and defocused successfully.
Keywords :
chemical vapour deposition; elemental semiconductors; microlenses; silicon; Si; electrically controlled flexible liquid micro lens; heat treatment; laser beam; micro fabrication techniques; nitride diaphragm; optical system; silicon wafer; Control systems; Heating; Lenses; Optical control; Optical device fabrication; Optical materials; Pressure control; Sealing materials; Silicon; Temperature control;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
Print_ISBN :
0-7803-7066-X
DOI :
10.1109/DTIP.2003.1287073
