A 4.3 mm2 ASIC for a 300 °/s 2-axis capacitive micro-gyroscope

The interface for a capacitive 2-axis micro-gyroscope is implemented in a 0.35-μm HVCMOS technology with a total area of 4.3 mm². The ASIC comprises the complete interface electronics for the gyroscope, while the focus of the design is in maintaining low supply current and in reducing the chip area. The core of the interface is the pseudo-continuous-time sense readout with an analog output, together with a continuous-time drive loop. The biasing and high-voltage generation will also be introduced in the paper. For the sensor that was implemented, the noise floors are 0.012°/s/√(Hz) for x-axis and 0.062°/s√(Hz) for y-axis. The supply current of the chip is 2.2 mA from a 3 V-supply.