DocumentCode
2825706
Title
Simulation based decision support for future 300 mm automated material handling
Author
Schulz, Markus ; Stanley, T.D. ; Sturm, R.
Author_Institution
Semicond.. 300, Dresden
Volume
2
fYear
2000
fDate
2000
Firstpage
1518
Abstract
Integrated factory models of semiconductor fabrication facilities allow conclusions to be drawn on the impact of a given automated material handling system (AMHS) and interactions between material flow and factory performance. A generic model of a 300 mm wafer fabrication facility has been built to support decisions to be made in terms of dimensioning of the potential AMHS solutions
Keywords
computer integrated manufacturing; decision support systems; digital simulation; materials handling; semiconductor device manufacture; automated material handling; factory performance; integrated factory models; material flow; semiconductor fabrication facilities; simulation based decision support; wafer fabrication facility; Discrete event simulation; Fabrication; Manufacturing automation; Materials handling; Production facilities; Productivity; Semiconductor device manufacture; Semiconductor device modeling; Transportation; Vehicles;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation Conference, 2000. Proceedings. Winter
Conference_Location
Orlando, FL
Print_ISBN
0-7803-6579-8
Type
conf
DOI
10.1109/WSC.2000.899134
Filename
899134
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