• DocumentCode
    2826185
  • Title

    Directly UV written silica-on-silicon planar waveguides with low insertion loss

  • Author

    Zauner, D. ; Svalgaard, M. ; Kristensen, M.

  • Author_Institution
    Mikroelektronik Centre, Tech. Univ., Lyngby, Denmark
  • fYear
    1998
  • fDate
    22-27 Feb. 1998
  • Firstpage
    149
  • Lastpage
    150
  • Abstract
    Summary form only given. The photosensitive properties of germanosilica may be utilized to directly induce waveguide patterns into thin-film structures using ultraviolet (UV) light. The advantages of fabricating planar waveguides with UV light include the absence of photolithography and reactive ion etching, flexibility in waveguide geometry, and excellent control of the refractive index step. Direct UV writing of waveguides became a realistic alternative to other fabrication methods when propagation losses below 0.2 dB/cm were reported in single-mode waveguides. However, the coupling loss to optical fibers remained high, typically 1.8 dB/facet, which is significantly more than that obtained with other techniques. In this paper we present results in which the coupling loss to optical fibers has been lowered substantially. In addition, the glass photosensitivity has been increased, thus permitting shorter fabrication times.
  • Keywords
    optical communication equipment; optical couplers; optical fabrication; optical fibre couplers; optical losses; optical planar waveguides; silicon compounds; silicon-on-insulator; Si; SiO/sub 2/-Si; UV light; directly UV written; fabrication methods; glass photosensitivity; integrated optical couplers; low insertion loss; optical fiber coupling loss; optical fibre couplers; photosensitive properties; propagation losses; refractive index step; shorter fabrication times; silica-on-silicon planar waveguides; single-mode waveguides; thin-film structures; waveguide geometry; waveguide patterns; Etching; Lithography; Optical coupling; Optical device fabrication; Optical fiber losses; Optical fibers; Optical planar waveguides; Optical waveguides; Planar waveguides; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communication Conference and Exhibit, 1998. OFC '98., Technical Digest
  • Conference_Location
    San Jose, CA, USA
  • Print_ISBN
    1-55752-521-8
  • Type

    conf

  • DOI
    10.1109/OFC.1998.657285
  • Filename
    657285