Title :
Research and Manufacture of the Micromechanical Relay for VHF Devices
Author :
Timoshenkov, S.P. ; Kalugin, V.V. ; Klochko, A.V. ; Kalugina, I.V. ; Zotov, S.A. ; Prokop´ev, E.P.
Author_Institution :
Moscow Inst. of Electron. Technol.
Abstract :
Technological processes of manufacturing of the micromechanical relay with an electrostatic principle of management are developed. The technological scheme of manufacturing of the micromechanical relay with use of a group way of assembly is realized. The results received are supposed to be used in manufacturing of the VHF devices
Keywords :
VHF devices; electron device manufacture; electrostatics; microassembling; microrelays; VHF device; electrostatic principle; group way of assembly; micromechanical relay manufacturing; technological process; Assembly; Electrostatics; Manufacturing processes; Micromechanical devices; Microwave devices; Physics; Region 8; Relays; Technology management; VHF devices;
Conference_Titel :
Microwave and Telecommunication Technology, 2006. CriMiCO '06. 16th International Crimean Conference
Conference_Location :
Sevastopol, Crimea
Print_ISBN :
966-7968-92-8
Electronic_ISBN :
966-7968-92-8
DOI :
10.1109/CRMICO.2006.256116
