Development of Piezo-Operated Dielectric Phase Shifter

Author

Poplavko, Y. ; Golubeva, I. ; Prokopenko, Y.

Author_Institution

Nat. Tech. Univ. of Ukraine

Volume

2

fYear

2006

fDate

Sept. 2006

Firstpage

600

Lastpage

603

Abstract

Possible alternative of low loss and highly tunable MEMS phase shifter is discussed. Dielectric or metallic parts of device should have the piezo-dirigible air gap between them. Important is to provide a strong perturbation in electro magnetic field in the region influenced by the mechanical control. Energy distribution within the device is controlled by piezoelectric actuator, and can be described as a change in effective dielectric permittivity (epsiv_eff). Some of highly tunable piezoelectric RF MEMS devices are realized experimentally

Keywords

electromagnetic fields; micromechanical devices; permittivity; phase shifters; piezoelectric actuators; dielectric part; dielectric permittivity; electro magnetic field; energy distribution; mechanical control; metallic part; perturbation; piezodirigible air gap; piezoelectric actuator control; tunable RF MEMS phase shifter; Dielectric substrates; Electrodes; Ferroelectric materials; Frequency; Microwave devices; Millimeter wave radar; Phase shifters; Radiofrequency microelectromechanical systems; Semiconductor materials; Tuning;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave and Telecommunication Technology, 2006. CriMiCO '06. 16th International Crimean Conference

Conference_Location

Sevastopol, Crimea

Print_ISBN

966-7968-92-8

Electronic_ISBN

966-7968-92-8

Type

conf

DOI

10.1109/CRMICO.2006.256123

Filename

4023405