Title :
Controlled formation of high Schottky barriers on InP and related materials
Author :
Hasegawa, Hideki
Author_Institution :
Res. Center for Interface Quantum Electron., Hokkaido Univ., Sapporo, Japan
Abstract :
The present status of the various ingenious approaches made until now to increase Schottky barrier heights (SBHs) on InP and related materials are reviewed from the viewpoints of the mechanism of SBH increase, the SBH values achieved, the controllability and reproducibility of the process, and the barrier reliability. The approaches discussed include: (1) formation of insulator interlayers, (2) formation of semiconductor interlayers, (3) sulphur and selenium surface treatments, (4) low temperature metal deposition, (5) plasma surface treatments, and (6) electrochemical deposition. Particular emphasis is placed on the in-situ electrochemical process by the author´s group where Fermi level pinning seems to be removed
Keywords :
III-V semiconductors; Schottky barriers; electrodeposition; indium compounds; plasma materials processing; surface treatment; Fermi level pinning; InP; Schottky barriers; barrier height; barrier reliability; electrochemical deposition; insulator interlayers; low temperature metal deposition; plasma surface treatment; semiconductor interlayers; Controllability; Indium phosphide; Insulation; Materials reliability; Metal-insulator structures; Plasma temperature; Reproducibility of results; Schottky barriers; Semiconductor materials; Surface treatment;
Conference_Titel :
Indium Phosphide and Related Materials, 1998 International Conference on
Conference_Location :
Tsukuba
Print_ISBN :
0-7803-4220-8
DOI :
10.1109/ICIPRM.1998.712508