DocumentCode
2826652
Title
Controlled formation of high Schottky barriers on InP and related materials
Author
Hasegawa, Hideki
Author_Institution
Res. Center for Interface Quantum Electron., Hokkaido Univ., Sapporo, Japan
fYear
1998
fDate
11-15 May 1998
Firstpage
451
Lastpage
454
Abstract
The present status of the various ingenious approaches made until now to increase Schottky barrier heights (SBHs) on InP and related materials are reviewed from the viewpoints of the mechanism of SBH increase, the SBH values achieved, the controllability and reproducibility of the process, and the barrier reliability. The approaches discussed include: (1) formation of insulator interlayers, (2) formation of semiconductor interlayers, (3) sulphur and selenium surface treatments, (4) low temperature metal deposition, (5) plasma surface treatments, and (6) electrochemical deposition. Particular emphasis is placed on the in-situ electrochemical process by the author´s group where Fermi level pinning seems to be removed
Keywords
III-V semiconductors; Schottky barriers; electrodeposition; indium compounds; plasma materials processing; surface treatment; Fermi level pinning; InP; Schottky barriers; barrier height; barrier reliability; electrochemical deposition; insulator interlayers; low temperature metal deposition; plasma surface treatment; semiconductor interlayers; Controllability; Indium phosphide; Insulation; Materials reliability; Metal-insulator structures; Plasma temperature; Reproducibility of results; Schottky barriers; Semiconductor materials; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 1998 International Conference on
Conference_Location
Tsukuba
ISSN
1092-8669
Print_ISBN
0-7803-4220-8
Type
conf
DOI
10.1109/ICIPRM.1998.712508
Filename
712508
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