• DocumentCode
    2826652
  • Title

    Controlled formation of high Schottky barriers on InP and related materials

  • Author

    Hasegawa, Hideki

  • Author_Institution
    Res. Center for Interface Quantum Electron., Hokkaido Univ., Sapporo, Japan
  • fYear
    1998
  • fDate
    11-15 May 1998
  • Firstpage
    451
  • Lastpage
    454
  • Abstract
    The present status of the various ingenious approaches made until now to increase Schottky barrier heights (SBHs) on InP and related materials are reviewed from the viewpoints of the mechanism of SBH increase, the SBH values achieved, the controllability and reproducibility of the process, and the barrier reliability. The approaches discussed include: (1) formation of insulator interlayers, (2) formation of semiconductor interlayers, (3) sulphur and selenium surface treatments, (4) low temperature metal deposition, (5) plasma surface treatments, and (6) electrochemical deposition. Particular emphasis is placed on the in-situ electrochemical process by the author´s group where Fermi level pinning seems to be removed
  • Keywords
    III-V semiconductors; Schottky barriers; electrodeposition; indium compounds; plasma materials processing; surface treatment; Fermi level pinning; InP; Schottky barriers; barrier height; barrier reliability; electrochemical deposition; insulator interlayers; low temperature metal deposition; plasma surface treatment; semiconductor interlayers; Controllability; Indium phosphide; Insulation; Materials reliability; Metal-insulator structures; Plasma temperature; Reproducibility of results; Schottky barriers; Semiconductor materials; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Indium Phosphide and Related Materials, 1998 International Conference on
  • Conference_Location
    Tsukuba
  • ISSN
    1092-8669
  • Print_ISBN
    0-7803-4220-8
  • Type

    conf

  • DOI
    10.1109/ICIPRM.1998.712508
  • Filename
    712508