Title :
Reduced height RF MEMS for low GHz frequency
Author :
Mishra, Bandana ; Alex, Z.C.
Author_Institution :
Sch. of Electron. Eng., VIT Univ., Vellore, India
Abstract :
RF MEMS switches are one of the most promising future micro-machined products that have attracted numerous research efforts in recent years. This paper aims to propose an electrostatically actuated RF MEMS switch with reduced height. The switch is designed and optimized using an electrical and mechanical model. A single bridge switch employing torsion spring has been described to achieve high isolation of -40 dB at 10GHz frequency and low pull-down voltage. The results show that the proposed switch is suitable for various X-band applications including phased array antennas/radars, impedance matching circuits, transmitters/receivers, phase shifters, and so on.
Keywords :
bridge circuits; micromachining; microswitches; springs (mechanical); torsion; X-band application; electrical model; electrostatically actuated RF MEMS switch; frequency 10 GHz; height reduction; impedance matching circuit; low pull-down voltage; mechanical model; micromachined product; phase shifter; phased array antenna; radar; receiver; single bridge switch; torsion spring; transmitter; Insertion loss; Micromechanical devices; Microswitches; Radio frequency; Springs; Switching circuits; RF MEMS; pull-down voltage; torsion spring;
Conference_Titel :
Applied Electromagnetics Conference (AEMC), 2011 IEEE
Conference_Location :
Kolkata
Print_ISBN :
978-1-4577-1098-8
DOI :
10.1109/AEMC.2011.6256899
