Title :
Microwave Contactless Method to Measure the Nonequilibrium Carriers´ Effective Lifetime in Si Wafers
Author :
Karpovich, I.A. ; Adakimchik, A.V. ; Kozlova, E.I. ; Odzhaev, V.B. ; Yankovsky, O.N.
Author_Institution :
Belorussian State Univ., Minsk
Abstract :
A method of contactless measurement of non-equilibrium carriers´ (NEC) effective lifetime in Si wafers has been developed; it allows forming a map of NEC effective lifetime surface distribution
Keywords :
carrier lifetime; microwave measurement; NEC effective lifetime surface distribution; Si; Si wafers; microwave contactless method; nonequilibrium carriers measurment; Boolean functions; Data structures; IEEE catalog; Microwave measurements; Microwave technology; Microwave theory and techniques; National electric code; Organizing; Silicon;
Conference_Titel :
Microwave and Telecommunication Technology, 2006. CriMiCO '06. 16th International Crimean Conference
Conference_Location :
Sevastopol, Crimea
Print_ISBN :
966-7968-92-8
Electronic_ISBN :
966-7968-92-8
DOI :
10.1109/CRMICO.2006.256198
