• DocumentCode
    2827573
  • Title

    Microwave Contactless Method to Measure the Nonequilibrium Carriers´ Effective Lifetime in Si Wafers

  • Author

    Karpovich, I.A. ; Adakimchik, A.V. ; Kozlova, E.I. ; Odzhaev, V.B. ; Yankovsky, O.N.

  • Author_Institution
    Belorussian State Univ., Minsk
  • Volume
    2
  • fYear
    2006
  • fDate
    Sept. 2006
  • Firstpage
    780
  • Lastpage
    781
  • Abstract
    A method of contactless measurement of non-equilibrium carriers´ (NEC) effective lifetime in Si wafers has been developed; it allows forming a map of NEC effective lifetime surface distribution
  • Keywords
    carrier lifetime; microwave measurement; NEC effective lifetime surface distribution; Si; Si wafers; microwave contactless method; nonequilibrium carriers measurment; Boolean functions; Data structures; IEEE catalog; Microwave measurements; Microwave technology; Microwave theory and techniques; National electric code; Organizing; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave and Telecommunication Technology, 2006. CriMiCO '06. 16th International Crimean Conference
  • Conference_Location
    Sevastopol, Crimea
  • Print_ISBN
    966-7968-92-8
  • Electronic_ISBN
    966-7968-92-8
  • Type

    conf

  • DOI
    10.1109/CRMICO.2006.256198
  • Filename
    4023480
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2827573