DocumentCode
2827717
Title
Double slot high-k waveguide grating couplers for silicon photonics
Author
Naiini, Maziar M. ; Henkel, Christoph ; Malm, Gunnar B. ; Östling, Mikael
Author_Institution
Sch. of Inf. & Commun. Technol., Integrated Devices & Circuits, KTH R. Inst. of TechnologyKTH R. Inst. of Technol., Kista, Sweden
fYear
2012
fDate
18-20 June 2012
Firstpage
69
Lastpage
70
Abstract
Fully etched grating couplers are manufactured for double slot high-k waveguides. These couplers have a maximum efficiency of 22 %. This higher achieved efficiency despite the lack of a matching fluid compared to the case of single slots (18.5 % ) is due to the higher confinement of the optical power in the slot region for the double slot structures. Doubling the slot number reduces the effective refractive index from 2.7 to 2.2.
Keywords
diffraction gratings; optical couplers; optical fabrication; optical waveguides; refractive index; silicon; silicon compounds; SiO2; double slot high-k waveguide grating couplers; effective refractive index; optical power; silicon photonics; Attenuation; Couplers; Gratings; High K dielectric materials; Optical filters; Optical waveguides; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference (DRC), 2012 70th Annual
Conference_Location
University Park, TX
ISSN
1548-3770
Print_ISBN
978-1-4673-1163-2
Type
conf
DOI
10.1109/DRC.2012.6256930
Filename
6256930
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