• DocumentCode
    2827717
  • Title

    Double slot high-k waveguide grating couplers for silicon photonics

  • Author

    Naiini, Maziar M. ; Henkel, Christoph ; Malm, Gunnar B. ; Östling, Mikael

  • Author_Institution
    Sch. of Inf. & Commun. Technol., Integrated Devices & Circuits, KTH R. Inst. of TechnologyKTH R. Inst. of Technol., Kista, Sweden
  • fYear
    2012
  • fDate
    18-20 June 2012
  • Firstpage
    69
  • Lastpage
    70
  • Abstract
    Fully etched grating couplers are manufactured for double slot high-k waveguides. These couplers have a maximum efficiency of 22 %. This higher achieved efficiency despite the lack of a matching fluid compared to the case of single slots (18.5 % ) is due to the higher confinement of the optical power in the slot region for the double slot structures. Doubling the slot number reduces the effective refractive index from 2.7 to 2.2.
  • Keywords
    diffraction gratings; optical couplers; optical fabrication; optical waveguides; refractive index; silicon; silicon compounds; SiO2; double slot high-k waveguide grating couplers; effective refractive index; optical power; silicon photonics; Attenuation; Couplers; Gratings; High K dielectric materials; Optical filters; Optical waveguides; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference (DRC), 2012 70th Annual
  • Conference_Location
    University Park, TX
  • ISSN
    1548-3770
  • Print_ISBN
    978-1-4673-1163-2
  • Type

    conf

  • DOI
    10.1109/DRC.2012.6256930
  • Filename
    6256930