Title :
A novel test methodology for MEMS magnetic micromotors
Author :
Kim, Bruce C. ; Marella, Krishna
Author_Institution :
Dept. of Electr. & Comput. Eng., Michigan State Univ., East Lansing, MI, USA
Abstract :
This paper describes a novel test methodology for testing MEMS magnetic micromotor. A fault simulation model has been developed for the micromotor. The test apparatus consists of a low frequency sinusoidal source and a resonator that is tuned to the normal operating frequency of the micromotor. The test method described in this paper is used to detect complete open and near-open defects in the stator coils of the micromotor
Keywords :
fault simulation; machine testing; micromotors; semiconductor device testing; stators; MEMS magnetic micromotors; Si; complete open defects; fault simulation model; low frequency sinusoidal source; near-open defects; normal operating frequency; resonator; stator coils; test methodology; Coils; Conductors; Magnetic cores; Magnetic flux; Micromagnetics; Micromechanical devices; Micromotors; Silicon; Stator cores; Testing;
Conference_Titel :
VLSI Test Symposium, 1999. Proceedings. 17th IEEE
Conference_Location :
Dana Point, CA
Print_ISBN :
0-7695-0146-X
DOI :
10.1109/VTEST.1999.766677
