DocumentCode
2828211
Title
A novel test methodology for MEMS magnetic micromotors
Author
Kim, Bruce C. ; Marella, Krishna
Author_Institution
Dept. of Electr. & Comput. Eng., Michigan State Univ., East Lansing, MI, USA
fYear
1999
fDate
1999
Firstpage
284
Lastpage
289
Abstract
This paper describes a novel test methodology for testing MEMS magnetic micromotor. A fault simulation model has been developed for the micromotor. The test apparatus consists of a low frequency sinusoidal source and a resonator that is tuned to the normal operating frequency of the micromotor. The test method described in this paper is used to detect complete open and near-open defects in the stator coils of the micromotor
Keywords
fault simulation; machine testing; micromotors; semiconductor device testing; stators; MEMS magnetic micromotors; Si; complete open defects; fault simulation model; low frequency sinusoidal source; near-open defects; normal operating frequency; resonator; stator coils; test methodology; Coils; Conductors; Magnetic cores; Magnetic flux; Micromagnetics; Micromechanical devices; Micromotors; Silicon; Stator cores; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Test Symposium, 1999. Proceedings. 17th IEEE
Conference_Location
Dana Point, CA
ISSN
1093-0167
Print_ISBN
0-7695-0146-X
Type
conf
DOI
10.1109/VTEST.1999.766677
Filename
766677
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