Title :
Electrical evidence of disorder at the SiO2/4H-SiC MOS interface and its effect on electron transport
Author :
Swandono, S. ; Penumatcha, A. ; Cooper, J.A.
Author_Institution :
Birck Nanotechnol. Center, Purdue Univ., West Lafayette, IN, USA
Abstract :
Silicon carbide Schottky diodes have been in commercial production since 2002, their use has saved about $2B in energy and prevented about 10M tons of CO2 from being released into the atmosphere worldwide, equivalent to taking 1.7M automobiles off the roads. Recently, SiC power DMOSFETs entered commercial production, ushering in a new era of opportunity for wide bandgap power electronics. Going forward, high-voltage SiC MOSFETs and IGBTs hold the key to more efficient energy utilization and renewable energy production.
Keywords :
Schottky diodes; insulated gate bipolar transistors; power MOSFET; power electronics; silicon compounds; wide band gap semiconductors; IGBT; MOS interface; Schottky diodes; SiO-H-SiC; electrical evidence; electron transport; power DMOSFET; wide bandgap power electronics; Dispersion; Electric potential; Electron mobility; Interface states; Silicon; Silicon carbide;
Conference_Titel :
Device Research Conference (DRC), 2012 70th Annual
Conference_Location :
University Park, TX
Print_ISBN :
978-1-4673-1163-2
DOI :
10.1109/DRC.2012.6257045