• DocumentCode
    2830662
  • Title

    High-resolution Imaging for Bio-Electron Microscope Using DLC Film

  • Author

    Kozuki, Tomotaka ; Nawachi, Norio ; Itoh, Koichi ; Kotera, Masatoshi

  • Author_Institution
    Dept. of Mech. & Robot., Hiroshima Int. Univ., Hiroshima, Japan
  • fYear
    2011
  • fDate
    June 30 2011-July 2 2011
  • Firstpage
    65
  • Lastpage
    70
  • Abstract
    We have studied the high-resolution imaging of a new Bio-Electron Microscope that makes use of DLC film as a bulkhead to separate the electron beam source and the sample holder. The electron beam source can be set up in a vacuum container thus placing the sample being inspected by the microscope under atmospheric pressure. For such a purpose, a thin film penetrable by electrons is required as the bulkhead. In addition, it needs to be strong enough to endure the atmospheric pressure, as well as the material is medically safe. This research has clarified that DLC film is the best film for this purpose and the influence that the distance of the atmospheric layer has on the acquisition of the image. Moreover, although the acceleration voltage of the present system is 30 kV, it should be preferable that observations are made at the lowest acceleration possible.
  • Keywords
    diamond-like carbon; image resolution; scanning electron microscopes; DLC film; atmospheric pressure; bio-electron microscope; electron beam source; high-resolution imaging; sample holder; Acceleration; Atmospheric modeling; Electron beams; Films; Microscopy; Stress; bio-electron microscope; dlc film; high-resolution imaging; low acceleration; under atmospheric pressure;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Complex, Intelligent and Software Intensive Systems (CISIS), 2011 International Conference on
  • Conference_Location
    Seoul
  • Print_ISBN
    978-1-61284-709-2
  • Electronic_ISBN
    978-0-7695-4373-4
  • Type

    conf

  • DOI
    10.1109/CISIS.2011.19
  • Filename
    5989020