Title :
Ion beam processes for ion implantation and surface modification
Author :
Ingram, David C.
Author_Institution :
Whickham Ion Beam Syst. Ltd., Ind. Res. Labs., Durham Univ., UK
Abstract :
Since the successful introduction of ion implantation into the semiconductor industry, ion beam technology has become a standard process tool in that industry. Other industries are now beginning to use ion implantation and the author discusses some of these applications and the process of ion implantation. Applications in the aerospace industry and optics industry are highlighted
Keywords :
electronic equipment manufacture; ion beam applications; ion implantation; aerospace industry; ion beam technology; ion implantation; optics industry; semiconductor industry; surface modification;
Conference_Titel :
High Energy Beam Processes for Industrial Applications, IEE Colloquium on
Conference_Location :
Middlesborough
