Accuracy analysis of SLM based micro stereo vision system

Author

Pei, Wei ; Zhu, Yong Ying ; Xu, Zheng ; Wang, Chen Xiang

Author_Institution

Environ. Sci. & Eng. Coll., Dalian Maritime Univ., Dalian, China

fYear

2012

fDate

June 30 2012-July 2 2012

Firstpage

363

Lastpage

368

Abstract

Based on the optical theory and digital image processing, the micro stereo imaging principle of Stereo Light Microscope (SLM) is studied and a SLM based micro stereo vision system is developed to improve three key problems including accuracy, speed and stability in Micro Electro Mechanical Systems (MEMS). In this paper, the system including micro stereo vision algorithms and hardware is introduced, and the accuracy is analyzed and compared with that of the representative systems according to the experimental data. Experimental results demonstrate that the proposed system is robust and effective in MEMS.

Keywords

micromechanical devices; optical microscopes; stereo image processing; MEMS; SLM based microstereo vision system; digital image processing; microelectro mechanical systems; optical theory; stereo light microscope; Accuracy; Educational institutions; Hardware; Microfluidics; Microscopy; Position measurement; Stereo vision; 3D photogrammetry; Accuracy analysis; Micro electro mechanical systems; Stereo light microscope;

fLanguage

English

Publisher

ieee

Conference_Titel

System Science and Engineering (ICSSE), 2012 International Conference on

Conference_Location

Dalian, Liaoning

Print_ISBN

978-1-4673-0944-8

Electronic_ISBN

978-1-4673-0943-1

Type

conf

DOI

10.1109/ICSSE.2012.6257208

Filename

6257208