Application of one-dimensional microwave photonic crystals for measurements of parameters of structures based on thin semiconductor layers

Author

Usanov, D.A. ; Nikitov, S.A. ; Skripal, A.V. ; Ponomarev, Denis V.

Author_Institution

Solid State Phys. Dept., Saratov State Univ. named after N.G. Chernyshevsky, Saratov, Russia

fYear

2012

fDate

May 28 2012-June 1 2012

Firstpage

229

Lastpage

233

Abstract

The possibility to simultaneously determine the thickness and the electrical conductivity of structures based on thin semiconductor layers, which play a role of the irregularity in one-dimensional waveguide photonic crystals, using the results of measurement of reflection and transmission spectra in microwave band has been shown. The results of computer modeling and the inverse problem solving are presented.

Keywords

electrical conductivity; elemental semiconductors; inverse problems; microwave photonics; microwave spectra; photonic crystals; semiconductor thin films; silicon; Si; computer modeling; electrical conductivity; one-dimensional microwave photonic crystals; one-dimensional waveguide photonic crystals; reflection spectra; thin semiconductor layers; transmission spectra; Conductivity; Electric variables measurement; Microwave measurements; Photonic crystals; Semiconductor device measurement; Substrates; Thickness measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Days on Diffraction (DD), 2012

Conference_Location

St. Petersburg

Print_ISBN

978-1-4673-4418-0

Type

conf

DOI

10.1109/DD.2012.6402785

Filename

6402785