Title :
Application of one-dimensional microwave photonic crystals for measurements of parameters of structures based on thin semiconductor layers
Author :
Usanov, D.A. ; Nikitov, S.A. ; Skripal, A.V. ; Ponomarev, Denis V.
Author_Institution :
Solid State Phys. Dept., Saratov State Univ. named after N.G. Chernyshevsky, Saratov, Russia
fDate :
May 28 2012-June 1 2012
Abstract :
The possibility to simultaneously determine the thickness and the electrical conductivity of structures based on thin semiconductor layers, which play a role of the irregularity in one-dimensional waveguide photonic crystals, using the results of measurement of reflection and transmission spectra in microwave band has been shown. The results of computer modeling and the inverse problem solving are presented.
Keywords :
electrical conductivity; elemental semiconductors; inverse problems; microwave photonics; microwave spectra; photonic crystals; semiconductor thin films; silicon; Si; computer modeling; electrical conductivity; one-dimensional microwave photonic crystals; one-dimensional waveguide photonic crystals; reflection spectra; thin semiconductor layers; transmission spectra; Conductivity; Electric variables measurement; Microwave measurements; Photonic crystals; Semiconductor device measurement; Substrates; Thickness measurement;
Conference_Titel :
Days on Diffraction (DD), 2012
Conference_Location :
St. Petersburg
Print_ISBN :
978-1-4673-4418-0
DOI :
10.1109/DD.2012.6402785
