Title :
P-channel strained single quantum well field effect transistors
Author :
Gonzalez-Sanz, F. ; Woodhead, J. ; Claxton, P.A.
Author_Institution :
Dept. of Electron. & Electr. Eng., Sheffield Univ., UK
Abstract :
One possible solution which has been proposed is the use of material incorporating a biaxial strain, lifting the degeneracy of the valence bands, thus giving light holes. Such material can be obtained in practice by growing epitaxial layers of III-V compounds with slightly different lattice parameters. Provided the layer thicknesses are kept small the resulting strain is not relieved by dislocations and is thus incorporated into the layers. The most popular material system for such strained structures has been InxGa1-xAs grown on a GaAs substrate. In this system the InxGa1-xAs has the larger natural lattice parameter but it is forced to take up the lattice parameter of the GaAs and is therefore under biaxial compression. This should cause holes travelling in the plane of the In xGa1-xAs to exhibit a low effective mass, and such light holes have been observed directly. This paper reports progress in the growth, fabrication and assessment of structures suitable for p-channel FETs
Keywords :
III-V semiconductors; epitaxial growth; gallium arsenide; high electron mobility transistors; indium compounds; semiconductor epitaxial layers; semiconductor growth; semiconductor quantum wells; semiconductor technology; III-V compounds; InxGa1-xAs-GaAs; assessment of structures; biaxial strain; different lattice parameters; epitaxial layers; fabrication; growth; light holes; p-channel FETs; p-channel HEMTs; strained single quantum well field effect transistors; strained structures;
Conference_Titel :
Heterojunction and Quantym Well Devices: Physics, Engineering and Applications, IEE Colloquium on
Conference_Location :
London