Discrete Sliding Mode Control of Piezo Actuator in Nano-Scale Range

In this paper discrete sliding mode control (SMC) of Piezo actuator is demonstrated in order to achieve a very high accuracy in Nano-scale with the desired dynamics. In spite of the fast dynamics of the Piezo actuator the problem of chattering is eliminated with the SMC control structure. The Piezo actuator suffers from hysteresis loop which is the inherent property and it gives rise to the dominant non-linearity in the system. The proposed SMC control structure has been proved to deliver chattering free motion along with the compensation of the non linearity present due to hysteresis in the system. To further enhance the accuracy of the closed loop system and to be invariant to changes in the plant parameters a robust disturbance observer is designed on SMC framework by taking into consideration the lumped nominal plant parameters. Experimental results for closed loop position and micromanipulation applications are presented in order to verify the Nano-scale accuracy.