Title :
UV scanning for SOI defectivity monitoring
Author :
Moulin, C. ; Delprat, D. ; Maleville, C. ; McMillan, W. ; Payne, J. ; Bird well, K. ; Brun, R. ; Moirin, R.
Author_Institution :
SOITEC SA, Crolles, France
Abstract :
This paper shows how a new generation of inspection system enables us to monitor SOI as requested in the ITRS roadmaps; it shows also the large amount of key information we can collect, giving us important feedback on the SOI process.
Keywords :
flaw detection; inspection; photodetectors; silicon-on-insulator; surface roughness; ultraviolet detectors; SOI process; UV scanning; defectivity monitoring; inspection system; silicon-on-insulator; Calibration; Inspection; Monitoring; Optical feedback; Optical scattering; Optical sensors; Optical surface waves; Reflectivity; Silicon; Wavelength measurement;
Conference_Titel :
SOI Conference, 2005. Proceedings. 2005 IEEE International
Print_ISBN :
0-7803-9212-4
DOI :
10.1109/SOI.2005.1563569
