Title :
Mode selective probing method of micro trench structure using optically trapped probe
Author :
Takaya, Y. ; Michihata, M. ; Hayashi, Teruaki ; Washitani, T.
Author_Institution :
Dept. of Mech. Eng., Osaka Univ., Suita, Japan
Abstract :
Probing techniques using the optically trapped probe with selective mode such as circular motion mode and SWS sensing mode are presented. The feasibility of both probing modes is confirmed by dimensional measurements of micro trench structure which is performed using the originally developed measurement system based on a CMM.
Keywords :
coordinate measuring machines; micromechanical devices; CMM; SWS sensing mode; circular motion mode; dimensional measurements; measurement system; micro trench structure; mode selective probing method; optically trapped probe; Charge carrier processes; Measurement by laser beam; Optical device fabrication; Optical sensors; Optical surface waves; Probes; Surface waves; CMM; micro trench structure; optically trapped probe; probing mode;
Conference_Titel :
Optomechatronic Technologies (ISOT), 2012 International Symposium on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-2875-3
DOI :
10.1109/ISOT.2012.6403241
