Title :
A reflective tunable blazed-grating for high energy femtosecond laser pulses
Author :
Pauls, M. ; Brunne, J. ; Wallrabe, U. ; Grunwald, Ruediger
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg - IMTEK, Freiburg, Germany
Abstract :
We present a tunable reflective blazed-grating for the use with high energy femtosecond laser pulses. The technology is based on the surface deformation of a viscoelastic polymer induced by the volume shrinkage of the polymer during crosslinking. The blaze-angle of the grating is tunable by thermal actuation. Thermal actuation and light propagation have been characterized.
Keywords :
actuators; diffraction gratings; high-speed optical techniques; light propagation; optical design techniques; optical fabrication; optical polymers; optical tuning; photoresists; viscoelasticity; crosslinking; high energy femtosecond laser pulses; light propagation; photoresist; reflective tunable blazed-grating; surface deformation; thermal actuation; viscoelastic polymer; Electric breakdown; Optical device fabrication; Optical reflection; Optical sensors; Temperature measurement; Ultrafast optics; Tunable reflective blazed-grating; femtosecond laser; thermal actuation; viscoelastic polymer;
Conference_Titel :
Optomechatronic Technologies (ISOT), 2012 International Symposium on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-2875-3
DOI :
10.1109/ISOT.2012.6403248
