Adaptive Fresnel mirror for ultrashort-pulse laser beam shaping

Author

Brunne, J. ; Wapler, M. ; Wallrabe, U. ; Treffer, A. ; Bock, M. ; Grunwald, Ruediger

Author_Institution

Dept. of Microsyst. Eng., Univ. of Freiburg - IMTEK, Freiburg, Germany

fYear

2012

fDate

29-31 Oct. 2012

Firstpage

1

Lastpage

2

Abstract

In this contribution we present a fast and robust adaptive Fresnel mirror for advanced nanomachining applications with femtosecond lasers. The Fresnel mirror consists of two mirror segments that are actuated with a piezoelectric bimorph. All components are fabricated by low-cost rapid prototyping processes without the need for a clean-room. Light propagation and pulse transfer have been characterized as well as the static and dynamic actuation properties.

Keywords

adaptive optics; laser beams; microactuators; mirrors; nanophotonics; optical fabrication; optical pulse shaping; piezoelectric actuators; rapid prototyping (industrial); adaptive Fresnel mirror; cost rapid prototyping; dynamic actuation; light propagation; nanomachining; piezoelectric bimorph; pulse transfer; static actuation; ultrashort-pulse laser beam shaping; Laser beams; Mirrors; Nonlinear optics; Optical interferometry; Optical pulse shaping; Optical sensors; Ultrafast optics; Adaptive Fresnel mirror; LIPSS; femtosecond laser machining; nanomachining; piezoelectric MOEMS;

fLanguage

English

Publisher

ieee

Conference_Titel

Optomechatronic Technologies (ISOT), 2012 International Symposium on

Conference_Location

Paris

Print_ISBN

978-1-4673-2875-3

Type

conf

DOI

10.1109/ISOT.2012.6403249

Filename

6403249