Title :
A new low frequency thermally compensated contour mode resonator
Author_Institution :
Swiss Center for Electron. & Microtechnol. Inc., Neuchatel, Switzerland
Abstract :
A thermally compensated quartz resonator for wrist-watch applications is described. It oscillates at a low frequency (524 kHz) in order to minimize oscillator power consumption. It could be mass-produced by using photolithography and chemical etching. The structure is analyzed and optimized with a contour mode computer program based on variational techniques. The thermal compensation is achieved by the mechanical coupling of two low frequency contour modes of the resonator, namely a flexure-type mode and an extensional-type mode. The structure is such that the elastic part of the mechanical coupling can be balanced with an inertial one for any crystallographic orientation of the substrate. The coupling factor vanishes, but not its thermal derivatives. It is shown that its influence is limited to the second and higher orders of the temperature coefficients of the frequencies
Keywords :
compensation; crystal resonators; quartz; 524 kHz; SiO2; chemical etching; contour mode computer program; contour mode resonator; coupling factor; crystallographic orientation; extensional-type mode; flexure-type mode; low frequency; mass-produced; mechanical coupling; minimize oscillator power consumption; photolithography; temperature coefficients; temperature compensation; thermal compensation; thermally compensated quartz resonator; two low frequency contour modes; variational techniques; wrist-watch applications; Application software; Chemicals; Crystallography; Energy consumption; Etching; Frequency; Lithography; Oscillators; Temperature; Thermal factors;
Conference_Titel :
Frequency Control, 1990., Proceedings of the 44th Annual Symposium on
Conference_Location :
Baltimore, MD
DOI :
10.1109/FREQ.1990.177521