• DocumentCode
    2841617
  • Title

    Piezoelectric beams and angular rate sensors

  • Author

    Söderkvist, Jan

  • Author_Institution
    Inst. of Technol., Uppsala Univ., Sweden
  • fYear
    1990
  • fDate
    23-25 May 1990
  • Firstpage
    406
  • Lastpage
    415
  • Abstract
    A study of a tuning fork angular rate sensor made out of a single piece of quartz is presented. The piezoelectric effect is used both to excite a reference vibration in the plane of the tuning fork and to detect a vibration normal to this plane. The amplitude of the second vibration is directly proportional to the applied angular velocity. The structure is made rigid in order for it to survive in a harsh environment. This implies that the only vibrationally active areas are the tines of the tuning fork. The performance of the sensor is predicted with the help of a phenomenological piezoelectric beam theory. This theory shows that it suffices to study the two-dimensional dielectric field in the cross-sections of the beams in order to obtain the values of the piezoelectric equivalent components. Estimates of these values can be obtained without the use of special computer programs. The predictions are shown to be in agreement with measurements
  • Keywords
    angular velocity measurement; crystal resonators; electric sensing devices; micromechanical devices; piezoelectric transducers; quartz; SiO2; applied angular velocity; harsh environment; phenomenological piezoelectric beam theory; piezoelectric effect; piezoelectric equivalent components; quartz; quartz tuning fork; tuning fork angular rate sensor; two-dimensional dielectric field; Actuators; Dielectrics; Equivalent circuits; Etching; Fabrication; Mechanical sensors; Resonance; Resonant frequency; Silicon; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control, 1990., Proceedings of the 44th Annual Symposium on
  • Conference_Location
    Baltimore, MD
  • Type

    conf

  • DOI
    10.1109/FREQ.1990.177526
  • Filename
    177526