DocumentCode :
2841617
Title :
Piezoelectric beams and angular rate sensors
Author :
Söderkvist, Jan
Author_Institution :
Inst. of Technol., Uppsala Univ., Sweden
fYear :
1990
fDate :
23-25 May 1990
Firstpage :
406
Lastpage :
415
Abstract :
A study of a tuning fork angular rate sensor made out of a single piece of quartz is presented. The piezoelectric effect is used both to excite a reference vibration in the plane of the tuning fork and to detect a vibration normal to this plane. The amplitude of the second vibration is directly proportional to the applied angular velocity. The structure is made rigid in order for it to survive in a harsh environment. This implies that the only vibrationally active areas are the tines of the tuning fork. The performance of the sensor is predicted with the help of a phenomenological piezoelectric beam theory. This theory shows that it suffices to study the two-dimensional dielectric field in the cross-sections of the beams in order to obtain the values of the piezoelectric equivalent components. Estimates of these values can be obtained without the use of special computer programs. The predictions are shown to be in agreement with measurements
Keywords :
angular velocity measurement; crystal resonators; electric sensing devices; micromechanical devices; piezoelectric transducers; quartz; SiO2; applied angular velocity; harsh environment; phenomenological piezoelectric beam theory; piezoelectric effect; piezoelectric equivalent components; quartz; quartz tuning fork; tuning fork angular rate sensor; two-dimensional dielectric field; Actuators; Dielectrics; Equivalent circuits; Etching; Fabrication; Mechanical sensors; Resonance; Resonant frequency; Silicon; Vibrations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Frequency Control, 1990., Proceedings of the 44th Annual Symposium on
Conference_Location :
Baltimore, MD
Type :
conf
DOI :
10.1109/FREQ.1990.177526
Filename :
177526
Link To Document :
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