Detection and Measurement of Thin Dielectric Layers Using Reflection of Frequency Scanned Millimetric Waves

Author

Bowring, Nicholas J. ; Baker, John G. ; Alder, John F.

Author_Institution

Manchester Metropolitan Univ., Manchester

fYear

2007

fDate

15-17 April 2007

Firstpage

437

Lastpage

442

Abstract

A method is described for detection and measurement of thin concealed dielectric layers using frequency scanned millimetre wave reflectometry, and carrying out a Burg or Fourier transformation of the results. Three dimensional data may potentially be obtained by moving the beam over the surface of the sample. Multiple layers of thickness ranging from 10 mm to 100 mm are readily detected and monitored through their microwave optical properties.

Keywords

Fourier transforms; dielectric thin films; microwave photonics; microwave reflectometry; millimetre wave detectors; millimetre wave measurement; thickness measurement; Burg transformation; Fourier transformation; frequency scanned millimetric wave reflectometry; microwave optical properties; size 10 mm to 100 mm; thin concealed dielectric layers; Dielectric measurements; Frequency measurement; Lenses; Optical harmonic generation; Optical interferometry; Optical receivers; Optical reflection; Optical surface waves; Optical transmitters; Thickness measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Networking, Sensing and Control, 2007 IEEE International Conference on

Conference_Location

London

Print_ISBN

1-4244-1076-2

Electronic_ISBN

1-4244-1076-2

Type

conf

DOI

10.1109/ICNSC.2007.372818

Filename

4239031