A high temperature MEMS heater for optical sensors

Author

Lin, Jing-Yuan ; Hsieh, Yu-Sheng ; Su, Shang-Chian

Author_Institution

Microsyst. Technol. Center, Ind. Technol. Res. Inst., Hsinchu, Taiwan

fYear

2011

fDate

19-21 Oct. 2011

Firstpage

451

Lastpage

453

Abstract

Infrared light source is a key component in the optical sensing systems especially for the Fourier-Transformed Infrared (FTIR) or different kinds of gas sensor system. This paper proposes a novel method for generating a broadband wavelength infrared light source by MEMS heater based on silicon on insulator (SOI) technology. The enhanced long-tern stability has been achieved by a low electrical resistance SOI wafer. This novel MEMS heater can achieve over than 1000°C. This MEMS heater could be integrated in micro sensing system such as metal oxide semiconductor and Non-dispersive infrared (NDIR) gas sensors.

Keywords

Fourier transform spectra; gas sensors; infrared sources; micromechanical devices; microsensors; optical sensors; silicon-on-insulator; Fourier transformed infrared; high temperature MEMS heater; infrared light source; long-tern stability; non-dispersive infrared gas sensors; optical sensors; silicon on insulator; temperature 1000 degC; Gas detectors; Heating; Micromechanical devices; Power demand; Silicon; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT), 2011 6th International

Conference_Location

Taipei

ISSN

2150-5934

Print_ISBN

978-1-4577-1387-3

Electronic_ISBN

2150-5934

Type

conf

DOI

10.1109/IMPACT.2011.6117255

Filename

6117255