Title :
Design and experimental verifications of an integrated micro-gyroscope
Author :
Chiu, Sheng-Ren ; Sue, Chung-Yang ; Lin, Shih-Ting ; Lin, Shih-Chieh ; Hsu, Yu-Wen ; Su, Yan-Kuin
Author_Institution :
Microsyst. Technol. Center, Ind. Technol. Res. Inst., Hsinchu, Taiwan
Abstract :
An integrated Z-axis micro-gyroscope is proposed in this paper. At first, the details of the mechanical structure design and dynamical analysis of micro-gyroscope is thoroughly discussed. The proposed micro-gyroscope is fabricated by the proposed high-aspect-ratio silicon-on-insulator bulk micro-machining process and integrated with the CMO S drive/sense ASIC by direct wire bonding. Finally, the preliminary experimental results of the presented integrated micro-gyroscope are examined and discussed.
Keywords :
CMOS integrated circuits; application specific integrated circuits; gyroscopes; lead bonding; micromachining; microsensors; silicon-on-insulator; CMOS drive-sense ASIC; direct wire bonding; dynamical analysis; integrated Z-axis micro-gyroscope; mechanical structure design; silicon-on-insulator bulk micromachining process; Accelerometers; Capacitors; Electrodes; Gyroscopes; Resonant frequency; Springs; Suspensions;
Conference_Titel :
Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT), 2011 6th International
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1387-3
Electronic_ISBN :
2150-5934
DOI :
10.1109/IMPACT.2011.6117259
