• DocumentCode
    2843418
  • Title

    AN APPROACH TO CHIP-INTERNAL CURRENT MONITORING AND MEASUREMENT USING AN ELECTRON BEAM TESTER

  • Author

    Helmreich, K. ; Nagel, P. ; Wolz, W. ; Muller-Glaser, K.D.

  • fYear
    1991
  • fDate
    26-30 Oct 1991
  • Firstpage
    256
  • Keywords
    Circuit testing; Current measurement; Electron beams; Electron emission; Magnetic field measurement; Magnetic fields; Monitoring; Semiconductor device measurement; Voltage measurement; Wires;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Test Conference, 1991, Proceedings., International
  • ISSN
    1089-3539
  • Print_ISBN
    0-8186-9156-5
  • Type

    conf

  • DOI
    10.1109/TEST.1991.519517
  • Filename
    519517