Title :
AN APPROACH TO CHIP-INTERNAL CURRENT MONITORING AND MEASUREMENT USING AN ELECTRON BEAM TESTER
Author :
Helmreich, K. ; Nagel, P. ; Wolz, W. ; Muller-Glaser, K.D.
Keywords :
Circuit testing; Current measurement; Electron beams; Electron emission; Magnetic field measurement; Magnetic fields; Monitoring; Semiconductor device measurement; Voltage measurement; Wires;
Conference_Titel :
Test Conference, 1991, Proceedings., International
Print_ISBN :
0-8186-9156-5
DOI :
10.1109/TEST.1991.519517