Title :
Special Section on the 2014 International Symposium on Semiconductor Manufacturing
Author :
Koike, Hidetoshi
Author_Institution :
Imaging Device Engineering Dept.Toshiba Corporation Semiconductor & Storage Products Company Image Sensor Div., Image Sensor and Module Development Group, Kanagawa, Japan
Abstract :
Semiconductor manufacturing technology is reliant on the sum of the total of engineers’ experiences and the accumulation of know-how and IP. The complexity of the field prevents a shift to the systematization and universalization of technologies. In order to bring breakthroughs in semiconductor manufacturing to reflect changing and challenging new requirements, the International Symposium on Semiconductor Manufacturing (ISSM) was launched in 1992.
Keywords :
Meetings; Monitoring; Process control; Semiconductor device manufacture; Special issues and sections;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2015.2453611
