Title :
Tunable FBARs: Intrinsic vs. extrinsic tunability
Author :
Gevorgian, S. ; Vorobiev, A.
Author_Institution :
Department of Microtechnology and Nanoscience, Chalmers University of Technology, 412 96 Gothenburg, Sweden
Abstract :
The methods used to make the Film Bulk Acoustic Resonators (FBAR) tunable is reviewed. Intrinsically tunable FBARs make use ferroelectrics in ferroelectric and paraelectric (non-polar) phases have tunabilities up to 5% and more. Extrinsically tunable resonators are based on traditional piezoelectric FBARs and make use of external varactors and inductors. The low tunability (<2%) and low Q-factor (Q<100 due to tuning components) limits applications of these resonators.
Keywords :
Acoustics; Piezoelectric polarization; Resonant frequency; Resonator filters; FBAR; acoustic resonator; tunable FBAR;
Conference_Titel :
Microwave Symposium Digest (MTT), 2012 IEEE MTT-S International
Conference_Location :
Montreal, QC, Canada
Print_ISBN :
978-1-4673-1085-7
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2012.6258382
