DocumentCode :
2847535
Title :
Surface roughness of thermally evaporated ZnS optical waveguides
Author :
Salleh, Saafie ; Chik, Abdullah ; Dalimin, M. Noh ; Salleh, M.M. ; Rutt, H.N.
Author_Institution :
Sch. of Sci. & Technol., Universiti Malaysia Sabah, Malaysia
fYear :
2005
fDate :
5-7 Sept. 2005
Firstpage :
229
Lastpage :
232
Abstract :
In this study, the propagation loss and the surfaces of ZnS thin films on silicon substrates have been investigated. ZnS thin films have been prepared by thermal evaporation at two different substrate temperatures, which were at ambient temperature and at °50°C. The propagation losses were measured with scanning detection technique attached to a prism coupling and the thin film surfaces were characterized with an atomic force microscope. The waveguide propagation loss of ambient deposited film is 131.50 dB/cm whereas the loss of cold deposited film is 20.41 dB/cm. The surface roughness of the waveguide is enhanced for cold evaporated ZnS film.
Keywords :
II-VI semiconductors; atomic force microscopy; evaporation; integrated optics; optical losses; optical waveguides; semiconductor thin films; surface roughness; wide band gap semiconductors; zinc compounds; -50 degC; Si; ZnS; ambient deposited film; atomic force microscope; cold deposited film; prism coupling; scanning detection; silicon substrates; surface roughness; thermal evaporation; thermally evaporated ZnS optical waveguides; thin film surfaces; thin films; waveguide propagation loss; Optical surface waves; Optical waveguides; Propagation losses; Rough surfaces; Substrates; Surface roughness; Surface waves; Temperature; Transistors; Zinc compounds; ZnS thin film; cold deposition; propagation loss; surface roughness;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors and the International Conference on new Techniques in Pharmaceutical and Biomedical Research, 2005 Asian Conference on
Print_ISBN :
0-7803-9370-8
Type :
conf
DOI :
10.1109/ASENSE.2005.1564546
Filename :
1564546
Link To Document :
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