• DocumentCode
    2848250
  • Title

    Micro-machining using photo-polymerization and metal jet deposition

  • Author

    Yamaguchi, Katsumi

  • Author_Institution
    Sch. of Eng., Nagoya Univ., Japan
  • fYear
    1997
  • fDate
    1997
  • Firstpage
    33
  • Lastpage
    40
  • Abstract
    This research work deals with the development of a simple and practical method for manufacturing micromechanical parts using different methods. The first method is a mask-based method in which an image is transferred to a liquid photopolymer by irradiating a UV laser through a patterned mask. The irradiated portion of the photopolymer is then solidified and it becomes a high aspect ratio polymer structure. In the second method, high aspect ratio and three-dimensional polymer structures are produced using direct focused UV laser beam writing. The accuracy of the solidified polymer when using these methods is examined. These methods produce micromechanical parts of produced shapes. In the third method, three-dimensional micro models are formed by metal jet deposition. The metal used in this experiment is solder. Some examples of three-dimensional products, electric circuits and functional gradient material are shown
  • Keywords
    jets; micromachining; photochemistry; polymerisation; direct focused UV laser beam writing; electric circuit; functional gradient material; high aspect ratio polymer structure; manufacture; mask; metal jet deposition; micromachining; micromechanical part; photopolymerization; solder; solidification; three-dimensional product; Focusing; Laser beams; Laser modes; Laser theory; Manufacturing; Micromechanical devices; Polymers; Semiconductor device manufacture; Shape; Writing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micromechatronics and Human Science, 1997. Proceedings of the 1997 International Symposium on
  • Conference_Location
    Nagoya
  • Print_ISBN
    0-7803-4171-6
  • Type

    conf

  • DOI
    10.1109/MHS.1997.768853
  • Filename
    768853