DocumentCode
2848250
Title
Micro-machining using photo-polymerization and metal jet deposition
Author
Yamaguchi, Katsumi
Author_Institution
Sch. of Eng., Nagoya Univ., Japan
fYear
1997
fDate
1997
Firstpage
33
Lastpage
40
Abstract
This research work deals with the development of a simple and practical method for manufacturing micromechanical parts using different methods. The first method is a mask-based method in which an image is transferred to a liquid photopolymer by irradiating a UV laser through a patterned mask. The irradiated portion of the photopolymer is then solidified and it becomes a high aspect ratio polymer structure. In the second method, high aspect ratio and three-dimensional polymer structures are produced using direct focused UV laser beam writing. The accuracy of the solidified polymer when using these methods is examined. These methods produce micromechanical parts of produced shapes. In the third method, three-dimensional micro models are formed by metal jet deposition. The metal used in this experiment is solder. Some examples of three-dimensional products, electric circuits and functional gradient material are shown
Keywords
jets; micromachining; photochemistry; polymerisation; direct focused UV laser beam writing; electric circuit; functional gradient material; high aspect ratio polymer structure; manufacture; mask; metal jet deposition; micromachining; micromechanical part; photopolymerization; solder; solidification; three-dimensional product; Focusing; Laser beams; Laser modes; Laser theory; Manufacturing; Micromechanical devices; Polymers; Semiconductor device manufacture; Shape; Writing;
fLanguage
English
Publisher
ieee
Conference_Titel
Micromechatronics and Human Science, 1997. Proceedings of the 1997 International Symposium on
Conference_Location
Nagoya
Print_ISBN
0-7803-4171-6
Type
conf
DOI
10.1109/MHS.1997.768853
Filename
768853
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