Properties and application of jet printed piezoelectric PZT film for actuation purposes

Author

Schroth, A. ; Ichiki, M. ; Akedo, J. ; Tanaka, M. ; Maeda, R.

Author_Institution

Mech. Eng. Lab., AIST, MITI, Tsukuba, Japan

fYear

1997

fDate

1997

Firstpage

67

Lastpage

72

Abstract

Although piezoelectric thin films are of great interest for actuator application in MEMS, deposition of PZT films with thickness between 5 and 100 μm has been hardly possible. It is therefore the goal of this paper, to investigate the properties of PZT-films of this thickness deposited by the recently introduced jet printing system, especially concerning an application in microactuator devices. On basic functional elements (beams, membranes) PZT-layers of 10 to 50 μm thickness were deposited, and their relative dielectric constant determined between 20 and 550. For the first time the piezoelectric constant of the jet printed PZT-layer was calculated to 20…30·10^-12 C/N from laser measurements of beam deflection, and therefore piezoelectric actuation capability could be proved directly

Keywords

lead compounds; membranes; microactuators; permittivity; piezoelectric actuators; piezoelectric thin films; spray coating techniques; spray coatings; 10 to 50 micron; MEMS actuator application; PZT; PbZrO3TiO3; beam deflection; beams; gas deposition; jet printed piezoelectric film; laser measurements; membranes; piezoelectric actuation capability; piezoelectric constant; relative dielectric constant; ultrafine particles; Biomembranes; Dielectric constant; Dielectric measurements; Laser beams; Microactuators; Micromechanical devices; Piezoelectric actuators; Piezoelectric films; Printing; Time measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micromechatronics and Human Science, 1997. Proceedings of the 1997 International Symposium on

Conference_Location

Nagoya

Print_ISBN

0-7803-4171-6

Type

conf

DOI

10.1109/MHS.1997.768859

Filename

768859