Flexible Silicon Microneedles Array for Micro Fluid Transfer

This paper reports on a new method of using silicon micro needle in bio-medical application. The hollow micro needle array have been designed and fabricated from single crystal silicon for transdermal delivery. The machined micro needles are shank height of 150mum with 250mum center-to-center spacing. The needle size, density and shape are controlled by independent processing steps. Packaging technology incorporates a micro needles array affixed to a polymeric adhesive base. The maximal adhesive patch size is 2 cm². Flow rate test is proved that the polymeric base construction is important to function of micro needles array. Glucose solution tests show that surface tension is the dominant force to affect the characters of flow in micro needles channel