Multi-variable iterative tuning of a variable gain controller with application to a scanning stage system

Author

Heertjes, M. ; Tepe, T. ; Nijmeijer, H.

Author_Institution

Dept. of Mech. Eng., Eindhoven Univ. of Technol., Eindhoven, Netherlands

fYear

2011

fDate

June 29 2011-July 1 2011

Firstpage

816

Lastpage

820

Abstract

Toward improved performance of fast and nano-accurate motion systems an iterative tuning procedure for the parameters of a variable gain controller is presented. Under constrained optimization, optimal values for the variable gain parameters are found by minimizing a quadratic function of the servo error signals in a representative sampled-data interval. An effective method for improved performances is demonstrated on a scanning stage system, using a combined model/data based approach in obtaining the gradients with respect to the parameters to be optimized.

Keywords

control system synthesis; iterative methods; multivariable systems; nanolithography; optimisation; sampled data systems; semiconductor device manufacture; constrained optimization; motion systems; multivariable iterative tuning; quadratic function; representative sampled-data interval; scanning stage system; servo error signals; variable gain controller; Convergence; Gain; Noise; Optimization; Switches; Tuning;

fLanguage

English

Publisher

ieee

Conference_Titel

American Control Conference (ACC), 2011

Conference_Location

San Francisco, CA

ISSN

0743-1619

Print_ISBN

978-1-4577-0080-4

Type

conf

DOI

10.1109/ACC.2011.5990907

Filename

5990907