DocumentCode
2848800
Title
Subminiature silicon pressure transducer
Author
Gieles, A.
Author_Institution
Philips Res. Labs., Eindhoven, Netherlands
Volume
XII
fYear
1969
fDate
19-21 Feb. 1969
Firstpage
108
Lastpage
109
Abstract
By combining spark erosion and electrochemical etching it has been found possible to fabricate solid-state microtransducers. Technology for a pressure transducer, with an epitaxial layer as the diaphragm, will be described.
Keywords
Capacitive sensors; Clamps; Electrodes; Epitaxial layers; Etching; Resistors; Silicon; Substrates; Thermal stresses; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference. Digest of Technical Papers. 1969 IEEE Internationa
Conference_Location
Philadelphia, PA, USA
Type
conf
DOI
10.1109/ISSCC.1969.1154778
Filename
1154778
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