Title :
Subminiature silicon pressure transducer
Author_Institution :
Philips Res. Labs., Eindhoven, Netherlands
Abstract :
By combining spark erosion and electrochemical etching it has been found possible to fabricate solid-state microtransducers. Technology for a pressure transducer, with an epitaxial layer as the diaphragm, will be described.
Keywords :
Capacitive sensors; Clamps; Electrodes; Epitaxial layers; Etching; Resistors; Silicon; Substrates; Thermal stresses; Transducers;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1969 IEEE Internationa
Conference_Location :
Philadelphia, PA, USA
DOI :
10.1109/ISSCC.1969.1154778
