Title :
Strength Reliability for Surfaces micro-machined Polycrystalline silicon Micro-Cantilevers
Author :
Jiang, Li-Li ; Tang, Jie-ying
Author_Institution :
Key Lab. of MEMS, Southeast Univ., Nanjing
Abstract :
MEMS components failure often happens where environment effects, such as shock, vibration, and temperature cycles. In this paper, the reliability of surfaces micro-machined polycrystalline silicon micro-cantilevers under shock loads was discussed. Using interference theory of stress and strength in the mechanical field, the reliability model was presented and it can predict the probability of the reliability of the cantilever under shock loads. It will help improve the design of MEMS
Keywords :
cantilevers; interference; mechanical stability; micromachining; micromechanical devices; silicon; stress analysis; MEMS; interference theory; polycrystalline silicon micro-cantilevers; shock load; strength reliability; surface micro-machine; surface reliability; Actuators; Electric shock; Mechanical factors; Microelectromechanical devices; Micromechanical devices; Predictive models; Reliability theory; Silicon; Stress; Surface cracks;
Conference_Titel :
Electronic Packaging Technology, 2005 6th International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
0-7803-9449-6
DOI :
10.1109/ICEPT.2005.1564631
