DocumentCode
2849013
Title
Chemisorption getter pump
Author
Monakhov, V.N. ; Popov, V.F. ; Krasilnikova, V.P.
Author_Institution
CSRI Elektropribor, St. Petersburg, Russia
fYear
1998
fDate
1998
Firstpage
55
Lastpage
56
Abstract
It is possible to maintain high vacuum in small volume devices during long term service using getter pumps connected to the devices. There is no magnetic system in the pump. Electrical energy is not needed when the pump is in operation. The micropumps work on the principle of chemisorption of residual chemically active gases. Regimes of degassing and pore titanium gas-adsorber activation were determined
Keywords
chemisorption; getters; micropumps; vacuum pumps; chemisorption getter pump; degassing; high vacuum; micropumps; pore titanium gas-adsorber activation; residual chemically active gases; small volume devices; Assembly; Chemicals; Gettering; Micropumps; Powders; Resistance heating; Surface treatment; Temperature; Titanium; Welding;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Instrument Engineering Proceedings, 1998. APEIE-98. Volume 1. 4th International Conference on Actual Problems of
Conference_Location
Novosibirsk
Print_ISBN
0-7803-4938-5
Type
conf
DOI
10.1109/APEIE.1998.768908
Filename
768908
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