Title :
Transition sheath “plasma-wall”
Author :
Zhykharsky, A.V. ; Yudin, B.I.
Author_Institution :
Novosibirsk State Tech. Univ., Russia
Abstract :
The boundary kinetic problem is considered for the “plasma-wall” transition sheath in the case that the boundary conditions for the plasma ion component at the “plasma-sheath” boundary has a shift in velocity. The appropriate boundary problem has been solved in a general form. The expression for the right hand side of the Poisson equation was obtained for the case where the boundary conditions for the distribution function (DF) of plasma components have the form of Maxwellian functions. Numerical investigations have been carried out of electrostatic potential over a wide range of velocities of the plasma ion component. The results obtained can serve as a background for constructing a theory of the transition sheath in the absence of a magnetic field
Keywords :
Poisson equation; boundary-value problems; plasma kinetic theory; plasma sheaths; plasma-wall interactions; Maxwellian functions; Poisson equation; boundary kinetic problem; boundary problem; electrostatic potential; numerical investigations; plasm component distribution function; plasma ion component; plasma-sheath boundary; plasma-wall transition sheath; Boundary conditions; Distribution functions; Electrostatics; Kinetic theory; Magnetic fields; Maxwell equations; Plasma materials processing; Plasma sheaths; Plasma sources; Poisson equations;
Conference_Titel :
Electronic Instrument Engineering Proceedings, 1998. APEIE-98. Volume 1. 4th International Conference on Actual Problems of
Conference_Location :
Novosibirsk
Print_ISBN :
0-7803-4938-5
DOI :
10.1109/APEIE.1998.768910
