Title :
Analysis of HF plasma generator power parameters
Author :
Geller, V.M. ; Khrustalev, V.A.
Abstract :
The generalized optimisation analysis of HF hybrid plasma generator parameters, HF and HFC devices being particular cases, is given in this paper. The circuit theory method without regard for gas dynamics features was used
Keywords :
gas-discharge tubes; high-frequency discharges; optimisation; plasma devices; plasma production; Debye radius; HF plasma generator; circuit theory method; cold losses; generalized optimisation analysis; hot capacity; hybrid plasma generator parameters; loop efficiency; power parameters analysis; Character generation; Hafnium; Inductors; Industrial economics; Instruments; Plasma applications; Plasma devices; Plasma properties; Power generation; Resonance;
Conference_Titel :
Electronic Instrument Engineering Proceedings, 1998. APEIE-98. Volume 1. 4th International Conference on Actual Problems of
Conference_Location :
Novosibirsk
Print_ISBN :
0-7803-4938-5
DOI :
10.1109/APEIE.1998.768924
