Title :
Experimental investigation of the Greek cross-shaped piezoresistive element
Author :
Gridchin, V.A. ; Gridchin, A.V. ; Lubimsky, V.M. ; Besedin, V.M.
Author_Institution :
Fac. of Radiotech., Electron. & Phys., Novosibirsk State Tech. Univ., Russia
Abstract :
Theoretical investigations, which have been carried out before, show that Greek cross shaped piezoresistive elements have sensitivity equal to the Wheatstone piezoresistive bridges. For the first time, experimental investigations of Greek cross shaped piezoresistive element, fabricated on a silicon cantilever, are carried out. Load characteristics and temperature dependencies are obtained. The temperature coefficients of the output voltage, surface resistance and piezoresistivity are calculated. The electrical circuit for thermocompensation is suggested and external resistors are selected
Keywords :
electric sensing devices; microsensors; piezoresistive devices; resistors; Greek cross-shaped; Si; current spread region; external resistors; load characteristics; output voltage; piezoresistive element; piezoresistivity; quasi-Hall geometry; sensitivity; silicon cantilever; surface resistance; temperature coefficients; temperature dependencies; thermocompensation circuit; Bridge circuits; Circuit topology; Physics; Piezoresistance; Piezoresistive devices; Silicon; Surface resistance; Temperature distribution; Temperature sensors; Voltage;
Conference_Titel :
Electronic Instrument Engineering Proceedings, 1998. APEIE-98. Volume 1. 4th International Conference on Actual Problems of
Conference_Location :
Novosibirsk
Print_ISBN :
0-7803-4938-5
DOI :
10.1109/APEIE.1998.768925
