Title :
Analysis of Response of the Micro-Machined Poly-Silicon Cantilever Subjected to Vibration Environment
Author :
Xu, Xiaoling ; Tang, Jieying
Author_Institution :
Key Lab. of MEMS of Educ. Minis., Southeast Univ., Nanjing
Abstract :
With the decrease in the dimension the microstructure, the effect of the interaction between the surfaces of the neighboring structures on the dynamic characteristics cannot be ignored. We present a comparison of the dynamic responses of the beam with and without considering the adhesive forces by simulating the dynamic behavior of the beam with a commercial software ANSYS. With the effect of the adhesive forces, the dynamic characteristics of the beam deviate from that of the beam without considering the adhesive forces. The reliability and the precision of the MEMS products using cantilevers are diminished
Keywords :
beams (structures); cantilevers; failure analysis; micromechanical devices; ANSYS software; MEMS products; adhesive forces; cantilevers; dynamic characteristics; dynamic responses; polysilicon cantilever; response analysis; vibration environment; Atomic measurements; Equations; Force measurement; Guidelines; Instruments; Micromechanical devices; Microstructure; Reliability theory; Structural beams; Vibrations;
Conference_Titel :
Electronic Packaging Technology, 2005 6th International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
0-7803-9449-6
DOI :
10.1109/ICEPT.2005.1564663
