Title :
Influence of parameters of ambient air on resistance of fullerene C 60 films [and sensor application]
Author :
Berdinsky, A.S. ; Shevtsov, Yu.V. ; Okotrub, A.V. ; Chadderton, L.T. ; Fink, D. ; Blukke, V.P.
Author_Institution :
Dept. of Semicond. Devices & Microelectron., Novosibirsk State Tech. Univ., Russia
Abstract :
We present some results relating to the influence of ambient air parameters (temperature, humidity, pressure) on the resistance of two sorts of fullerene films (non-annealed and thermal annealed) in the temperature range 330-390°C. Fullerene films were obtained by gas-phase deposition on sapphire substrate. The results have shown that the resistance of the films depends strongly on ambient air parameters. This allows fullerene films to be used as sensitive materials for temperature, humidity, pressure sensor devices
Keywords :
electrical resistivity; elemental semiconductors; fullerene devices; fullerenes; humidity sensors; pressure sensors; semiconductor thin films; temperature sensors; 330 to 390 C; C60; ambient air parameters influence; electric resistivity; fullerene films; gas-phase deposition; humidity influence; humidity sensor; polycrystalline films; pressure influence; pressure sensor; sapphire substrate; temperature influence; temperature sensor; thermal annealed films; unannealed films; Annealing; Construction industry; Contacts; Electrical products industry; Electrical resistance measurement; Gas industry; Laboratories; Optical films; Production; Temperature dependence;
Conference_Titel :
Electronic Instrument Engineering Proceedings, 1998. APEIE-98. Volume 1. 4th International Conference on Actual Problems of
Conference_Location :
Novosibirsk
Print_ISBN :
0-7803-4938-5
DOI :
10.1109/APEIE.1998.768927
