Title :
MEMS thermal mass flow meter with double-heater structure
Author :
Wu, Yuan-Qing ; Yao, Su-Ying
Author_Institution :
Sch. of Electron. & Inf. Eng., Tianjin Univ., Tianjin, China
Abstract :
With the development of new technology, MEMS thermal flow meter has been rapidly developed. But the existing single-heater models, limit its scope of use, cannot measure high-volume gas flow. In order to change the status, a double-heater structure is presented in this paper, the results of simulation and analysis show that this structure can greatly improve the performance of flow meters.
Keywords :
flowmeters; micromechanical devices; MEMS thermal mass flow meter; double heater structure; high volume gas flow; single heater model; Fluid flow measurement; Heating; Micromechanical devices; Temperature measurement; Temperature sensors; MEMS; double-heater structure; flow meter;
Conference_Titel :
Electron Devices and Solid-State Circuits (EDSSC), 2011 International Conference of
Conference_Location :
Tianjin
Print_ISBN :
978-1-4577-1998-1
Electronic_ISBN :
Pending
DOI :
10.1109/EDSSC.2011.6117606
