Title :
Programmable readout circuit for capacitive accelerometer
Author :
Jingqing, Huang ; Mingming, Zhang ; Zhongjian, Chen ; Yilong, Hao ; Haojiong, Li ; Xiangyun, Meng ; Wengao, Lu ; Yacong, Zhang ; Weiguo, Su ; Song, Li
Author_Institution :
Dept. of Microelectron., Peking Univ., Beijing, China
Abstract :
A programmable readout circuit for capacitive accelerometer is presented. The inequality of initial capacitance of sensor´s differential capacitor pair is properly compensated. The gain of CSA and the cut-off frequency of LPF are both adjustable. To lower noises, amplifier of CSA is carefully designed. Its equivalent input noise density is 12.7nV/ √ Hz. A rail-to-rail buffer is chosen to enlarge the measurement range. EEPROM instead of pads is exploited, which saves about 33 percent of the layout area.
Keywords :
EPROM; accelerometers; amplifiers; capacitive sensors; readout electronics; CSA; EEPROM; LPF; capacitive accelerometer; cut-off frequency; equivalent input noise density; programmable readout circuit; rail-to-rail buffer; sensor differential capacitor; Accelerometers; Capacitance; Capacitors; Cutoff frequency; EPROM; Layout; Noise; EEPROM; Programmable; capacitive accelerometer; low noise; rail-to-rail;
Conference_Titel :
Electron Devices and Solid-State Circuits (EDSSC), 2011 International Conference of
Conference_Location :
Tianjin
Print_ISBN :
978-1-4577-1998-1
Electronic_ISBN :
Pending
DOI :
10.1109/EDSSC.2011.6117621
