Programmable readout circuit for capacitive accelerometer

Author

Jingqing, Huang ; Mingming, Zhang ; Zhongjian, Chen ; Yilong, Hao ; Haojiong, Li ; Xiangyun, Meng ; Wengao, Lu ; Yacong, Zhang ; Weiguo, Su ; Song, Li

Author_Institution

Dept. of Microelectron., Peking Univ., Beijing, China

fYear

2011

fDate

17-18 Nov. 2011

Firstpage

1

Lastpage

2

Abstract

A programmable readout circuit for capacitive accelerometer is presented. The inequality of initial capacitance of sensor´s differential capacitor pair is properly compensated. The gain of CSA and the cut-off frequency of LPF are both adjustable. To lower noises, amplifier of CSA is carefully designed. Its equivalent input noise density is 12.7nV/ √ Hz. A rail-to-rail buffer is chosen to enlarge the measurement range. EEPROM instead of pads is exploited, which saves about 33 percent of the layout area.

Keywords

EPROM; accelerometers; amplifiers; capacitive sensors; readout electronics; CSA; EEPROM; LPF; capacitive accelerometer; cut-off frequency; equivalent input noise density; programmable readout circuit; rail-to-rail buffer; sensor differential capacitor; Accelerometers; Capacitance; Capacitors; Cutoff frequency; EPROM; Layout; Noise; EEPROM; Programmable; capacitive accelerometer; low noise; rail-to-rail;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices and Solid-State Circuits (EDSSC), 2011 International Conference of

Conference_Location

Tianjin

ISSN

Pending

Print_ISBN

978-1-4577-1998-1

Electronic_ISBN

Pending

Type

conf

DOI

10.1109/EDSSC.2011.6117621

Filename

6117621